Corrugated Carbon Nanotube Microstructures with Geometrically Tunable Compliance

被引：29

作者：

De Volder, Michael F. L. ^{[1
,2
,3
]}

Tawfick, Sameh ^{[1
]}

Park, Sei Jin ^{[1
]}

Hart, A. John ^{[1
]}

机构：

[1] Univ Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA

[2] Katholieke Univ Leuven, Dept Mech Engn, B-3001 Louvain, Belgium

[3] IMEC, B-3001 Heverlee, Belgium

来源：

ACS NANO | 2011年 / 5卷 / 09期

基金：

美国国家科学基金会;

关键词：

carbon nanotubes; three-dimensional; microstructure spring; anisotropic; self-assembly; NEGATIVE POISSONS RATIO; SURFACES; GROWTH; ASSEMBLIES; CATALYST; FORESTS; SILICON; ARRAYS; FILMS;

D O I：

10.1021/nn202156q

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Deterministic organization of nanostructures into microscale geometries is essential for the development of materials with novel mechanical, optical, and surface properties. We demonstrate scalable fabrication of 3D corrugated carbon nanotube ((NT) microstructures, via an iterative sequence of vertically aligned (NT growth and capillary self-assembly. Vertical microbellows and tilted microcantilevers are created over large areas, and these structures can have thin walls with aspect ratios exceeding 100:1. We show these structures can be used as out-of-plane microsprings with compliance determined by the wall thickness and number of folds.

引用

页码：7310 / 7317

页数：8

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