Development of super -smooth flat silicon mirror substrates using bowl -feed chemical -mechanical polishing

被引：12

作者：

Belure, A. R. ^{[1
,2
]}

Biswas, A. K.

Raghunathan, D. ^{[1
]}

Rishipal ^{[1
]}

Bhartiya, S. ^{[3
]}

Singh, Rashmi ^{[3
]}

Rai, S. K. ^{[4
]}

Pawade, R. S. ^{[2
]}

Kamath, M. P. ^{[1
]}

Benerji, N. S. ^{[1
]}

机构：

[1] Raja Ramanna Ctr Adv Technol, Laser Technol Div, Indore 452013, India

[2] Dr Babasaheb Ambedkar Technol Univ, Dept Mech Engn, Indore 402103, India

[3] Raja Ramanna Ctr Adv Technol, Laser & Funct Mat Div, Indore 452013, India

[4] Raja Ramanna Ctr Adv Technol, Synchrotrons Utilizat Sect, Indore 452013, India

来源：

MATERIALS TODAY-PROCEEDINGS | 2020年 / 26卷

关键词：

TEFLON;

D O I：

10.1016/j.matpr.2020.02.490

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：2260 / 2264

页数：5

共 12 条

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