CMOS Ultrasonic Receiver With On-Chip Analog-to-Digital Front End for High-Resolution Ultrasound Imaging Systems

被引：21

作者：

Cheng, Teng-Chuan ^{[1
,2
]}

Tsai, Tsung-Heng ^{[1
,2
,3
]}

机构：

[1] Natl Chung Cheng Univ, Dept Elect Engn, Chiayi 62102, Taiwan

[2] Natl Chung Cheng Univ, Adv Inst Mfg High Tech Innovat, Chiayi 62102, Taiwan

[3] Minist Educ, Heterogeneous Integrat Consortium, Taipei, Taiwan

来源：

IEEE SENSORS JOURNAL | 2016年 / 16卷 / 20期

关键词：

CMUT; CMOS; TIA; ultrasonic; transducer; continuous-time Delta Sigma modulator; IMPROVED PERFORMANCE; CMUT; TRANSDUCER; MODULATOR; RANGE; NOISE; ARRAY;

D O I：

10.1109/JSEN.2016.2599580

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

CMOS capacitive micromachined ultrasonic transducer (CMUT) with integrated front-end circuits for portable high resolution ultrasonic imaging systems is presented. The CMUT array operates with 30 V power supply. In addition, the interlayer metal CMUTs with non-uniform membrane are proposed to improve the sensitivity in this paper. A prototype chip containing 48 elements as 12 channels is implemented. The conversion efficiency of the proposed CMUTs is 5.84 times higher than that in the published literatures. The maximum ultrasonic signal bandwidth is 4.5 MHz. CMUT array and the transimpedance amplifiers are integrated on the same chip. In addition, a multibit continuous-time Delta Sigma modulator was designed and fabricated in another chip using 0.18-mu m standard CMOS process. The chips size are 1.84 and 0.177 mm(2), and the total power consumption in the receiving mode is approximately 3.01 mW with 1.8 V power supply.

引用

页码：7454 / 7463

页数：10

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