A fabrication process for microstrip-coupled superconducting transition edge sensors giving highly reproducible device characteristics

被引：13

作者：

Glowacka, D. M. ^{[1
]}

Goldie, D. J. ^{[1
]}

Withington, S. ^{[1
]}

Crane, M. ^{[1
]}

Tsaneva, V. ^{[1
]}

Audley, M. D. ^{[1
]}

Bunting, A. ^{[2
]}

机构：

[1] Univ Cambridge, Cavendish Lab, Cambridge, England

[2] Scottish Microelect Ctr, Edinburgh, Midlothian, Scotland

来源：

JOURNAL OF LOW TEMPERATURE PHYSICS | 2008年 / 151卷 / 1-2期

关键词：

transition edge sensors; superconducting microstrip; submillimeter-wave detectors;

D O I：

10.1007/s10909-007-9635-z

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Astronomical instruments for measuring Cosmic Microwave Background polarisation, such as CLOVER, require large arrays of Superconducting Transition Edge Sensors (TESs). We report recent results from a processing route development aimed at high yield fabrication of microstrip-coupled TESs. The incoming signal is delivered onto a silicon nitride membrane by means of a superconducting microstrip transmission line. This transmission line is then terminated with a thin-film load resistor. The wafer-based fabrication route of the Mo/Cu TESs gives highly reproducible device characteristics in terms of superconducting transition temperature, electrical and thermal characteristics. An overall device yield of 65% has been achieved for a multi-wafer processing run.

引用

页码：249 / 254

页数：6

共 6 条

[1]

AUDLEY MD, 2006, P 17 INT S SPAC TER, P8285

[2] Characterising the electrothermal properties of microstrip-coupled TES detectors. [J].