Growth of GaN Layers on Sapphire by Low-Temperature-Deposited Buffer Layers and Realization of p-type GaN by Magesium Doping and Electron Beam Irradiation (Nobel Lecture)

被引:35
作者
Amano, Hiroshi [1 ]
机构
[1] Nagoya Univ, Akasaki Res Ctr, Venture Business Lab, Dept Elect Engn & Comp Sci, Nagoya, Aichi 4648601, Japan
关键词
blue LEDs; electron beam; gallium nitride; light-emitting diodes; semiconductors; VAPOR-PHASE EPITAXY; LIGHT-EMITTING-DIODES; DOPED GAN; DOUBLE-HETEROSTRUCTURE; ROOM-TEMPERATURE; CRYSTAL-GROWTH; MOVPE GROWTH; FILMS; ALN; SUBSTRATE;
D O I
10.1002/anie.201501651
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
This Review is a personal reflection on the research that led to the development of a method for growing gallium nitride (GaN) on a sapphire substrate. The results paved the way for the development of smart display systems using blue LEDs. The most important work was done in the mid to late 80s. The background to the author's work and the process by which the technology that enables the growth of GaN and the realization of p-type GaN was established are reviewed.
引用
收藏
页码:7764 / 7769
页数:6
相关论文
共 52 条
[41]   HOLE COMPENSATION MECHANISM OF P-TYPE GAN FILMS [J].
NAKAMURA, S ;
IWASA, N ;
SENOH, M ;
MUKAI, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (5A) :1258-1266
[42]   INSITU MONITORING OF GAN GROWTH USING INTERFERENCE EFFECTS [J].
NAKAMURA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (08) :1620-1627
[43]   EFFECT OF GROWTH PARAMETERS ON EPITAXIAL-GROWTH OF BP ON SI SUBSTRATE [J].
NISHINAGA, T ;
MIZUTANI, T .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1975, 14 (06) :753-760
[44]  
Ohki Y., 1981, I PHYS C SER, V63, P479
[45]  
Pankove J. I., 1971, Journal of Luminescence, V4, P63, DOI 10.1016/0022-2313(71)90009-3
[46]  
PHILLIPS J.C., 1973, BONDS BANDS SEMICOND
[47]   Thermodynamical properties of III-V nitrides and crystal growth of GaN at high N-2 pressure [J].
Porowski, S ;
Grzegory, I .
JOURNAL OF CRYSTAL GROWTH, 1997, 178 (1-2) :174-188
[48]   ANALYSIS OF 2-STEP-GROWTH CONDITIONS FOR GAN ON AN ALN BUFFER LAYER [J].
SASAKI, T ;
MATSUOKA, T .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (01) :192-200
[49]   Luminescence conversion of blue light emitting diodes [J].
Schlotter, P ;
Schmidt, R ;
Schneider, J .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1997, 64 (04) :417-418
[50]   Quantum-confined stark effect due to piezoelectric fields in GaInN strained quantum wells [J].
Takeuchi, T ;
Sota, S ;
Katsuragawa, M ;
Komori, M ;
Takeuchi, H ;
Amano, H ;
Akasaki, I .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1997, 36 (4A) :L382-L385