Development of piezoelectric microcantilever flow sensor with wind-driven energy harvesting capability

被引：90

作者：

Liu, Huicong ^{[1
]}

Zhang, Songsong ^{[1
]}

Kathiresan, Ramprakash ^{[1
]}

Kobayashi, Takeshi ^{[2
]}

Lee, Chengkuo ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore

[2] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058564, Japan

来源：

APPLIED PHYSICS LETTERS | 2012年 / 100卷 / 22期

关键词：

D O I：

10.1063/1.4723846

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have developed a piezoelectric (PZT) microcantilever as an air flow sensor and a wind-driven energy harvester for a self-sustained flow-sensing microsystem. A flow sensing sensitivity of 0.9 mV/(m/s) is obtained. The output voltage and optimized power regarding to the load resistance of 100 k Omega are measured as 18.1 mV and 3.3 nW at flow velocity of 15.6 m/s, respectively. The corresponding power density is as large as 0.36 mW/cm(3). The experimental results have elucidated the smart function of using PZT microcantilevers as flow-sensors and wind-driven energy harvesters simultaneously. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4723846]

引用

页数：3

共 15 条

[1]

Blevins RD, 2001, Flow-induced vibration, V2nd

[2]

Candrakasan A., 1998, IEEE INT S CIRC SYST, V4, P604

[3]

Enoksson P., 1997, J MICROELECTROMECH S, V6, P2

[4]

Gerhart P.M., 1992, FUNDAMENTALS FLUID M

[5] Self-Powered System with Wireless Data Transmission [J].

Hu, Youfan ;

Zhang, Yan ;

Xu, Chen ;

Lin, Long ;

Snyder, Robert L. ;

Wang, Zhong Lin .

NANO LETTERS, 2011, 11 (06) :2572-2577

[6] A T-shaped piezoelectric cantilever for fluid energy harvesting [J].

Kwon, Soon-Duck .

APPLIED PHYSICS LETTERS, 2010, 97 (16)

[7] Smart catheter flow sensor for real-time continuous regional cerebral blood flow monitoring [J].

Li, Chunyan ;

Wu, Pei-Ming ;

Hartings, Jed A. ;

Wu, Zhizhen ;

Ahn, Chong H. ;

LeDoux, David ;

Shutter, Lori A. ;

Narayan, Raj K. .

APPLIED PHYSICS LETTERS, 2011, 99 (23)

[8]

Liu H, 2011, J MICROELECTROMECH S, V20, P1225

[9] A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz [J].

Liu, Huicong ;

Lee, Chengkuo ;

Kobayashi, Takeshi ;

Tay, Cho Jui ;

Quan, Chenggen .

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2012, 18 (04) :497-506

[10] Investigation of a MEMS piezoelectric energy harvester system with a frequency-widened-bandwidth mechanism introduced by mechanical stoppers [J].

Liu, Huicong ;

Lee, Chengkuo ;

Kobayashi, Takeshi ;

Tay, Cho Jui ;

Quan, Chenggen .

SMART MATERIALS AND STRUCTURES, 2012, 21 (03)

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