Experimental Analysis of the Surface Integrity of Single-crystal Calcium Fluoride caused by Ultra-precision Turning

被引：9

作者：

Azami, Shunya ^{[1
]}

Hiroshi, Kudo ^{[2
]}

Tanabe, Takasumi ^{[2
]}

Yan, Jiwang ^{[3
]}

Kakinuma, Yasuhiro ^{[1
]}

机构：

[1] Keio Univ, Fac Sci & Technol, Dept Syst Design Engn, Kohoku Ku, Yokohama, Kanagawa 2238522, Japan

[2] Keio Univ, Fac Sci & Technol, Dept Elect & Elect Engn, Kohoku Ku, Yokohama, Kanagawa 2238522, Japan

[3] Keio Univ, Fac Sci & Technol, Dept Mech Engn, Kohoku Ku, Yokohama, Kanagawa 2238522, Japan

来源：

2ND CIRP CONFERENCE ON SURFACE INTEGRITY (CSI) | 2014年 / 13卷

关键词：

Anisotropy; Ultra-precision; Surface Integrity;

D O I：

10.1016/j.procir.2014.04.039

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

To achieve maximally efficient signal processing, an electrical signal processing circuit needs to be replaced with an optical one. Optical micro-resonators, storing light at certain spots, are essential for optical signal processing. Single-crystal Calcium Fluoride (CaF2) is the most suitable material for highly efficient optical micro-resonators, and a resonator made of CaF2 can be manufactured by ultra-precision machining. However, the performance of such optical micro-resonators depends on its surface integrity. In this study, the relation between the crystal anisotropy and surface integrity after ultra-precision cutting was investigated. The most difficult point in the cylindrical turning of a crystalline material is that the crystalline plane and the cutting direction constantly vary. We analyzed crack initiation and surface integrity of the entire machined surface from the perspective of slip system and cleavage. Subsurface damage was also observed by using the TEM and X-ray analyzers for more efficient manufacturing of optical micro-resonators. (C) 2014 The Authors. Published by Elsevier B.V.

引用

页码：225 / 229

页数：5

共 14 条

[1] Ultra-high-Q toroid microcavity on a chip [J].