High-resolution x-ray spectroscopy close to room temperature

被引:48
作者
Strüder, L
Meidinger, N
Stotter, D
Kemmer, J
Lechner, P
Leutenegger, P
Soltau, H
Eggert, F
Rohde, M
Schulein, T
机构
[1] Max Planck Inst Extraterr Phys, Halbleiterlab, D-81245 Munich, Germany
[2] KETEK GmbH, D-85764 Oberschleissheim, Germany
[3] RONTEC GmbH, D-12489 Berlin, Germany
关键词
X-ray charge-coupled devices; silicon drift detector; backside illumination; on-chip electronics; high count rate operation; X-ray fluorescence analysis; portable spectrometers;
D O I
10.1017/S1431927698980606
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Originally designed as position-sensitive detectors for particle tracking, silicon drift detectors (SDDs) are now used for high-count rate X-ray spectroscopy, operating close to room temperature. Their low-capacitance read-node concept places them among the fastest high-resolution detector systems. They have been used in a new spectrum of experiments in the wide field of X-ray spectroscopy: fluorescent analysis, diffractometry, materials analysis, and synchrotron experiments such as X-ray holography and element imaging in scanning electron microscopes. The fact that the detector system can be used at room temperature with good spectroscopic performance and at -10 degrees C with excellent energy resolution, avoiding liquid nitrogen for cooling and high-quality vacuum, guarantees a large variety of new applications, independent of the laboratory environment. A brief description of the device principles is followed by basics on low noise amplification. The performance results of a complete detector system are presented as well as some dedicated applications already realized, including use in a surface mapping instrument and use of a "mini-spectrometer" for the analysis of works of art. Fully depleted pn-charge-coupled devices (pn-CCDs) have been fabricated for the European X-ray Multi-Mirror mission (XMM) and the German X-ray satellite ABRIXAS, enabling high-speed, low-noise, position-resolving X-ray spectroscopy. The detector was designed and fabricated with a homogeneously sensitive area of 36 cm(2). At -70 degrees C it has a noise of 4 e- rms, with a readout time of the total focal plane array of 4 msec. The maximum count rate for single photon counting was 10(5) cps under flat field conditions. In the integration mode, more than 10(9) cpa can be detected at 6 keV. its position resolution is on the order of 100 mu m. The quantum efficiency is higher than 90%, ranging from carbon K X-rays (277 eV) up to 10 keV.
引用
收藏
页码:622 / 631
页数:10
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