Step contrast in low energy electron microscopy

被引:53
作者
Chung, WF [1 ]
Altman, MS [1 ]
机构
[1] Hong Kong Univ Sci & Technol, Dept Phys, Kowloon, Peoples R China
关键词
low energy electron microscopy (LEEM); image simulation; step-phase contrast; surface step;
D O I
10.1016/S0304-3991(98)00043-6
中图分类号
TH742 [显微镜];
学科分类号
摘要
A wave-optical. model for surface step-phase contrast in low energy electron microscopy (LEEM) is presented. Step contrast is calculated as the interference of the Fresnel diffracted waves from terrace edges which meet at a step. Instrumental resolution and beam coherence, i.e., as defined by source extension and energy spread, are also considered. Model predictions are compared to experimental observations of steps on the W(1 1 0), Mo(1 0 0) and Si(1 1 1) surfaces. This work allows for the routine identification of the step sense with LEEM. (C) 1998 Published by Elsevier Science B.V. All rights reserved.
引用
收藏
页码:237 / 246
页数:10
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