Symbiotic simulation control in semiconductor manufacturing

被引：0

作者：

Aydt, Heiko ^{[1
]}

Turner, Stephen John ^{[1
]}

Cai, Wentong ^{[1
]}

Low, Malcolm Yoke Hean ^{[1
]}

Lendermann, Peter ^{[2
]}

Gan, Boon Ping ^{[2
]}

机构：

[1] Nanyang Technol Univ, Sch Comp Engn, Singapore 639798, Singapore

[2] D SIMLAB Technol Pte Ltd, Singapore 138671, Singapore

来源：

COMPUTATIONAL SCIENCE - ICCS 2008, PT 3 | 2008年 / 5103卷

关键词：

D O I：

暂无

中图分类号：

TP31 [计算机软件];

学科分类号：

081202 ; 0835 ;

摘要：

Semiconductor manufacturing is a highly complex and asset intensive process. Solutions are needed to automate control of equipment and improve efficiency. We describe a symbiotic simulation control system which uses reactive what-if analysis to find a stable configuration of a wet bench tool set. This control system is based on a generic framework for symbiotic simulation. We show that symbiotic simulation can be used to make control decisions in near real-time. Furthermore, we show that our approach yields a notable performance improvement over common practise.

引用

页码：26 / +

页数：3

共 19 条

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