共 8 条
[1]
AGROSKIN VY, 1975, DOKL AKAD NAUK SSSR+, V225, P830
[2]
[Anonymous], 2015, NIST Chemical Kinetics Database, Standard Reference Database 17, Version 7.0 (Web Version)
[3]
Batovskii O. M., 1974, Soviet Journal of Quantum Electronics, V4, P801, DOI 10.1070/QE1974v004n06ABEH009336
[4]
FEDOTOV VG, 1972, DOKL AKAD NAUK SSSR+, V203, P406
[5]
MECHANISMS OF THE HF/H2O VAPOR-PHASE ETCHING OF SIO2
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1992, 10 (04)
:806-811
[6]
Kochetkov S.P., 2007, CONCENTRATION PURIFI
[8]
Ryss I.G., 1956, CHEM FLUORINE ITS IN