SiGeBiCMOS technology for RF circuit applications

被引:38
作者
Racanelli, M [1 ]
Kempf, P [1 ]
机构
[1] Jazz Semicond, Newport Beach, CA 92660 USA
关键词
process technology; RF circuits; SiGeBiCMOS; wireless;
D O I
10.1109/TED.2005.850696
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
SiGe BiCMOS is reviewed with focus on today's production 0.18-mu m technology at f(T)/f(MAX) of 150/200 GHz and future technology where device scaling is bringing about higher f(T)/f(MAX), as well as lower power consumption, noise figure, and improved large-signal performance at higher levels of integration. High levels of radio freqency (RF) integration are enabled by the availability of a number of active and passive modules described in this paper including high voltage and high-power devices, complementary PNPs, high quality NUM capacitors, and inductors. Key RF circuit results highlighting the advantages of SiGe BiCMOS in addressing today's RF IC market are also discussed both for applications at modest frequencies (1 to 10 GHz) as well as for emerging applications at higher frequencies (20 to > 100 GHz).
引用
收藏
页码:1259 / 1270
页数:12
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