The optic material removal rate improved by vibration assistance in continuous polishing

被引：2
作者：
Zhang, Feihu [1 ]
Wang, Yiren [1 ,2 ]
Liao, Defeng [2 ]
Xu, Qiao [2 ]
机构：
[1] Harbin Inst Technol, Sch Mech Engn, Dazhi St, Harbin 150001, Peoples R China
[2] China Acad Engn Phys, Res Ctr Laser Fus, Mianyang 621900, Sichuan, Peoples R China
来源：
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY | 2021年 / 117卷 / 9-10期
关键词：
Vibration assisted; Continuous polishing; MRR; Optics; SURFACE FIGURE; ERROR;
D O I：
10.1007/s00170-021-07806-9
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
To solve the problem of fast convergence in large aperture plane optics continuous polishing, the concept of vibration-assisted polishing is proposed in this paper. The paper first builds a low-frequency short-range vibration processing platform based on large-size polishing tools. Then, the kinematics and polishing pressure of the optics without vibration and vibration are analyzed. Furthermore, the pressure distribution under the element is simulated based on the finite element method. Finally, the material removal rate (MRR) is calculated based on Preston equation, which proves that the removal rate of optics under vibration condition is higher. In this paper, the problem of optics removal efficiency in continuous polishing is solved and the material enhanced removal mechanism is revealed.
引用
收藏
页码：3075 / 3082
页数：8
相关论文
共 16 条
[1]   Material removal mechanisms in abrasive vibration polishing of complex molds [J].
Brinksmeier, E. ;
Riemer, O. ;
Schulte, H. .
5TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES, 2010, 7655
[2]   Analysis of the convergence rules of full-range PSD surface error of magnetorheological figuring KDP crystal [J].
Chen, Shaoshan ;
He, Deyu ;
Wu, Yi ;
Chen, Huangfei ;
Zhang, Zaijing ;
Chen, Yunlei .
APPLIED OPTICS, 2016, 55 (28) :8056-8062
[3]   ANNULAR LAPPING OF PRECISION OPTICAL FLATWARE [J].
COOKE, F ;
BROWN, N ;
PROCHNOW, E .
OPTICAL ENGINEERING, 1976, 15 (05) :407-415
[4]   New vibration-assisted magnetic abrasive polishing (VAMAP) method for microstructured surface finishing [J].
Guo, Jiang ;
Kum, Chun Wai ;
Au, Ka Hing ;
Tan, Zhi'En Eddie ;
Wu, Hu ;
Liu, Kui .
OPTICS EXPRESS, 2016, 24 (12) :13542-13554
[5]   Vibration-assisted dry polishing of fused silica using a fixed-abrasive polisher [J].
Li, Yaguo ;
Wu, Yongbo ;
Zhou, Libo ;
Fujimoto, Masakazu .
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2014, 77 :93-102
[6]   Deterministic control of material removal distribution to converge surface figure in full-aperture polishing [J].
Liao, Defeng ;
Zhang, Feihu ;
Xie, Ruiqing ;
Zhao, Shijie ;
Wang, Jian ;
Xu, Qiao .
JOURNAL OF MANUFACTURING PROCESSES, 2020, 53 :144-152
[7]   Improvement of the surface shape error of the pitch lap to a deterministic continuous polishing process [J].
Liao, Defeng ;
Xie, Ruiqing ;
Sun, Rongkang ;
Zhao, Shijie ;
Ren, Lele ;
Zhang, Feihu ;
Wang, Jian ;
Xu, Qiao .
JOURNAL OF MANUFACTURING PROCESSES, 2018, 36 :565-570
[8]   Kinematic model for material removal distribution and surface figure in full-aperture polishing [J].
Liao, Defeng ;
Ren, Lele ;
Zhang, Feihu ;
Wang, Jian ;
Xu, Qiao .
APPLIED OPTICS, 2018, 57 (04) :588-593
[9]  
Nelson DG, 2010, OPTICAL FABRICATION
[10]  
Preston F.W., 1927, J SOC GLASS TECHNOLO, V11, P214
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