Highly-Sensitive Graphene-based Flexible Pressure Sensor Platform

被引：2

作者：

Shazni, Muhammad Aniq ^{[1
]}

Lee, Mai Woon ^{[1
]}

Lee, Hing Wah ^{[1
]}

机构：

[1] MIMOS Berhad, MIMOS Semicond M Sdn Bhd, Technol Pk Malaysia, Kuala Lumpur 57000, Federal Territo, Malaysia

来源：

SAINS MALAYSIANA | 2017年 / 46卷 / 07期

关键词：

Chemical vapor deposition (CVD); flexible; graphene; interdigitated electrodes (IDE); pressure sensor; wearables; RESONATORS;

D O I：

10.17576/jsm-2017-4607-19

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

In this work, graphene has been utilized as the sensing material for the development of a highly-sensitive flexible pressure sensor platform. It has been demonstrated that a graphene-based pressure sensor platform that is able to measure pressure change of up to 3 psi with a sensitivity of 0.042 psi(-1) and a non-linearity of less than 1% has been accomplished. The developed device, which resides on a flexible platform, will be applicable for integration in continuous wearables health-care monitoring system for the measurement of blood pressure.

引用

页码：1155 / 1161

页数：7

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