Optical scatterometry of subwavelength diffraction gratings: neural-network approach

被引：44

作者：

Kallioniemi, I

Saarinen, J

Oja, E

机构：

[1] Aalto Univ, Dept Engn Math & Phys, FIN-02015 Espoo, Finland

[2] Aalto Univ, Dept Comp Sci & Engn, FIN-02015 Espoo, Finland

来源：

APPLIED OPTICS | 1998年 / 37卷 / 25期

关键词：

D O I：

10.1364/AO.37.005830

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Optical scatterometry is a method for the on-line measurement of the geometry of a diffraction grating; which is deduced from diffraction-pattern data. We demonstrate the use of a neural network as a promising method for performing an accurate quantitative characterization of the geometry. As an example, we show the deduction of the geometry of a grating with subwavelength grooves with a ms accuracy of 1.9 for the slope of the groove walls, 0.7 nm for the linewidth, and 1.0 nm for the groove depth. (C) 1998 Optical Society of America.

引用

页码：5830 / 5835

页数：6

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