The enhanced nucleation factors and field electron emission property of diamond synthesized by RF-PECVD

被引:0
作者
Yang, Guangmin [3 ]
Xu, Qiang [4 ]
Wang, Xin [1 ,2 ]
Zheng, Weitao [1 ,2 ]
机构
[1] Jilin Univ, Dept Mat Sci, Key Lab Mobile Mat, MOE, Changchun 130012, Peoples R China
[2] Jilin Univ, State Key Lab Superhard Mat, Changchun 130012, Peoples R China
[3] Changchun Normal Univ, Coll Phys, Changchun 130032, Jilin, Peoples R China
[4] Changchun Inst Technol, Changchun 130021, Peoples R China
基金
中国国家自然科学基金;
关键词
Diamond; Films; PECVD; Field electron emission property; VAPOR-DEPOSITION; GROWTH; FILM; MECHANISMS; TITANIUM; HYDROGEN; AFFINITY; SURFACE;
D O I
10.1016/j.jallcom.2011.12.032
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In this work, submicron-diamond (SD), microcrystalline diamond (MD), and nanocrystalline diamond (ND) were synthesized using different substrates and pretreatment methods. In order to investigate influencing factors on nucleation, three techniques have been developed to create some density of diamond on substrate surfaces: (a) with chemical-etching technique (NaOH water solution at 80 degrees C for 3, 8, 15 min, respectively), (b) (Co(NO3)(3)/Mg(NO3)(2)center dot 6H(2)O or Fe(NO3)(3)center dot 9H(2)O/Mg(NO3)(2)center dot 6H(2)O alcohol solution) dripping on silicon substrate, and (c) NaCl substrate directly by following a same PECVD deposition procedure. Furthermore, the field electron emission property was also investigated. (C) 2011 Elsevier B. V. All rights reserved.
引用
收藏
页码:98 / 102
页数:5
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