A novel design method for SAW temperature sensor with monotonic and linear frequency-temperature behavior in wide temperature range

被引：16

作者：

Li, Ling ^{[1
]}

Peng, Bin ^{[1
]}

Wang, Yi ^{[2
]}

Wang, Bowen ^{[1
]}

Huang, He ^{[1
]}

Zhang, Wanli ^{[1
]}

Zhu, Jialiang ^{[3
]}

Liao, Longtao ^{[3
]}

机构：

[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 611731, Peoples R China

[2] Space Star Technol Co Ltd, Beijing 100086, Peoples R China

[3] Nucl Power Inst China, Sci & Technol Reactor Syst Design Technol Lab, Chengdu 610213, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2020年 / 307卷

基金：

中国国家自然科学基金;

关键词：

SAW temperature sensor; Monotonic and linear; frequency-temperature behavior; LGS SAW sensor; Second-order frequency-temperature coefficient; LANGASITE; LA3GA5SIO14; CUTS;

D O I：

10.1016/j.sna.2020.111982

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, a novel method was proposed to achieve linear temperature dependent frequency in SAW temperature sensors. The designed SAW temperature sensor can operate in a wide temperature range without the limitation originated from the large second-order frequency-temperature coefficient of traditional SAW resonators. An SAW temperature sensor which consists of two SAW resonators was designed with the proposed method. The frequency characteristics of the SAW resonators were measured from room temperature up to 600 degrees C. The resonance frequency shows good linearity as the function of the temperature. This novel design method can be widely applied in the SAW temperature sensors based on the piezoelectric substrates with large second-order frequency-temperature coefficient. (C) 2020 Elsevier B.V. All rights reserved.

引用

页数：5

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