Highly Non-linear and Reliable Amorphous Silicon Based Back-to-Back Schottky Diode as Selector Device for Large Scale RRAM Arrays

被引:15
作者
Hsieh, Cheng-Chih [1 ]
Chang, Yao-Feng [1 ]
Chen, Ying-Chen [1 ]
Shahrjerdi, Davood [2 ]
Banerjee, Sanjay K. [1 ]
机构
[1] Univ Texas Austin, Microelect Res Ctr, Austin, TX 78758 USA
[2] NYU, Dept Elect & Comp Engn, Brooklyn, NY 11201 USA
基金
美国国家科学基金会;
关键词
RESISTIVE SWITCHING MEMORY;
D O I
10.1149/2.0041709jss
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this work, we present silicon process compatible, stable and reliable (> 10(8) cycles), high non-linearity ratio at a half-read voltage (> 5 x 10(5)), high speed (< 60 ns), and low operating voltage (< 3V) back-to-back Schottky diodes. Materials choice of electrode, the thickness of semiconductor layer and doping level are investigated by numerical simulation, experiments and current-voltage equations to give a general design consideration when back-to-back Schottky diodes are used as selector device for Resistive Random Access Memory (RRAM) arrays. (c) The Author(s) 2017. Published by ECS. All rights reserved.
引用
收藏
页码:N143 / N147
页数:5
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