Development of a Compact Ion Source with a Hot Hollow Cathode

被引：0
|
作者：
Miyamoto, N. [1 ]
Demura, Y. [2 ]
Imakita, S. [2 ]
Kasuya, T. [2 ]
Vasquez, M. R., Jr. [2 ]
Wada, M. [2 ]
机构：
[1] Nissin Ion Equipment Co LTD, Minami Ku, 575 Kuzetonoshiro Cho, Kyoto 6018205, Japan
[2] Doshisha Univ, Grad Sch Engn, Kyoto 6100394, Japan
来源：
ION IMPLANTATION TECHNOLOGY 2010 | 2010年 / 1321卷
关键词：
ion source; hot cathode; hollow cathode; arc discharge; hydrogen beam; argon beam; MAGNETIC-FIELD;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A compact ion source with 14 mm diameter, 30 mm long discharge region was developed. A total size of the ion source including the beam extraction system was 60 mm in diameter and 160 mm in length. A high temperature coaxial cathode consisting of thin-wall tantalum and tungsten tubes produced a discharge plasma. A source gas was supplied through the inner W tube of the coaxial cathode. A stable plasma of H-2 was maintained with the discharge current of 2.0 A at 68 A cathode heating current. The optimum H-2 gas pressure for ion beam extraction was 2x10(-2) Pa. Hydrogen ion beam current was 120 mu A (1 mA/cm(2)) at 2.0 A discharge current and 3.0 kV extraction voltage.
引用
收藏
页码：448 / +
页数：2
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