Statistical self-calibrating algorithm for phase-shift interferometry based on a smoothness assessment of the intensity offset map

被引：6

作者：

Dobroiu, A ^{[1
]}

Apostol, D ^{[1
]}

Nascov, V ^{[1
]}

Damian, V ^{[1
]}

机构：

[1] Natl Inst Lasers Plasma & Radiat Phys, R-76900 Bucharest, Romania

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 1998年 / 9卷 / 09期

关键词：

wavefront phase; laser interferometer; phase-shift interferometry; profilometry; interferometry;

D O I：

10.1088/0957-0233/9/9/013

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

By processing a set of three phase-shifted interferograms one can determine the actual phase steps between recordings by assuming that the calculated map of the intensity offset has the smallest pixel to pixel variations when the supposed values of the phase steps match the actual ones. Based on this principle a new statistical self-calibrating algorithm for phase-shift interferometry is presented. Numerous tests were carried out to check the ability of the new algorithm to find the correct values of the actual phase steps. Algorithm limitations are discussed.

引用

页码：1451 / 1455

页数：5

共 7 条

[1] Statistical self-calibrating algorithm for three-sample phase-shift interferometry [J].

Dobroiu, A ;

Logofatu, PC ;

Apostol, D ;

Damian, V .

MEASUREMENT SCIENCE AND TECHNOLOGY, 1997, 8 (07) :738-745

[2] Self-calibrating algorithm for three-sample phase-shift interferometry by contrast levelling [J].

Dobroiu, A ;

Apostol, D ;

Nascov, V ;

Damian, V .

MEASUREMENT SCIENCE AND TECHNOLOGY, 1998, 9 (05) :744-750

[3]

DOBROIU A, 1997, FRIGE 97 AUTOMATIC P, V3, P129

[4] PHASE STEP MEASUREMENT AND VARIABLE STEP ALGORITHMS IN PHASE-SHIFTING INTERFEROMETRY [J].

FARRELL, CT ;

PLAYER, MA .

MEASUREMENT SCIENCE AND TECHNOLOGY, 1992, 3 (10) :953-958

[5] PHASE-STEP INSENSITIVE ALGORITHMS FOR PHASE-SHIFTING INTERFEROMETRY [J].

FARRELL, CT ;

PLAYER, MA .

MEASUREMENT SCIENCE AND TECHNOLOGY, 1994, 5 (06) :648-652

[6] NUMERICAL CORRECTION OF REFERENCE PHASES IN PHASE-SHIFTING INTERFEROMETRY BY ITERATIVE LEAST-SQUARES FITTING [J].

HAN, GS ;

KIM, SW .

APPLIED OPTICS, 1994, 33 (31) :7321-7325

[7] SIMULTANEOUS CALCULATION OF PHASE DISTRIBUTION AND SCANNING PHASE-SHIFT IN PHASE-SHIFTING INTERFEROMETRY [J].

OKADA, K ;

SATO, A ;

TSUJIUCHI, J .

OPTICS COMMUNICATIONS, 1991, 84 (3-4) :118-124

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