High temperature characterization of implanted-emitter 4H-SiC BJT

被引:2
作者
Tang, Y [1 ]
Fedison, JB [1 ]
Chow, TP [1 ]
机构
[1] Rensselaer Polytech Inst, Ctr Integrated Elect & Elect Mfg, Troy, NY 12180 USA
来源
2000 IEEE/CORNELL CONFERENCE ON HIGH PERFORMANCE DEVICES, PROCEEDINGS | 2000年
关键词
D O I
10.1109/CORNEL.2000.902536
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We demonstrate high-temperature characteristics of the first epi-base, implanted-emitter npn bipolar transistor in 4H-SiC. The device shows high current gain with negative temperature coefficient. The turn-off time decreases with increasing temperature.
引用
收藏
页码:178 / 181
页数:4
相关论文
共 5 条
[1]  
BHALLA A, 1994, 6 INT S POW SEM DEV, P287
[2]   Characterization of phosphorus implantation in 4H-SiC [J].
Khemka, V ;
Patel, R ;
Ramungul, N ;
Chow, TP ;
Ghezzo, M ;
Kretchmer, J .
JOURNAL OF ELECTRONIC MATERIALS, 1999, 28 (03) :167-174
[3]  
RYU SH, 2000, 57 DEV RES C JUN
[4]  
TANG Y, 2000, 57 DEV RES C JUN
[5]  
WANG Y, 1995, SIL CARB REL MAT C K, P809