Mass transfer, detection and repair technologies in micro-LED displays

被引:44
作者
Zhu, Guiqiang [1 ]
Liu, Yijing [1 ]
Ming, Rui [1 ]
Shi, Feng [1 ]
Cheng, Mengjiao [1 ]
机构
[1] Beijing Univ Chem Technol, State Key Lab Chem Resource Engn, Beijing 100029, Peoples R China
基金
美国国家科学基金会; 中国国家自然科学基金;
关键词
micro-LED; mass transfer; detection and repair of micro-LED; pick-and-place; self-assembly; LIGHT-EMITTING-DIODES; SELF-ASSEMBLED MONOLAYERS; ELASTOMERIC SURFACES; PRINTED ASSEMBLIES; ADHESION STRENGTH; NITRIDE; FABRICATION; SUBSTRATE; LAYER;
D O I
10.1007/s40843-022-2110-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Micro-light emitting diode (micro-LED) is an emerging display technology with excellent performance of high contrast, low power consumption, long lifetime, and fast response time compared with the current display (e.g., liquid crystal and organic LED (OLED)). With technological advantages, micro-LED holds promise to be widely applied in augmented reality (AR), flexible screens, etc. and is thus regarded as the next generation of display technology. In the process flow of micro-LED, the step known as mass transfer that requires transferring millions of micro-LEDs from a growth substrate to a display plane, is one of the key challenges limiting the commercialization of micro-LED from laboratory. Worldwide academic and industrial efforts have been devoted to developing mass transfer strategies with purposes of improving yield and reducing cost. Herein we review three main categories of mass transfer technologies for micro-LED display (pick-and-place, fluid self-assembly and laser-enabled advanced placement) and the coupled detection and repair technologies after transfer. Discussions and comparisons have been provided about the underlying general principle, history, and representative parties, advantages, and disadvantages (yield/efficiency/cost) of these technologies. We further envision the application prospect of these transfer technologies and the promise of the future display of micro-LED.
引用
收藏
页码:2128 / 2153
页数:26
相关论文
共 163 条
[31]   Three-Dimensional Fluidic Self-Assembly by Axis Translation of Two-Dimensionally Fabricated Microcomponents in Railed Microfluidics [J].
Chung, Su Eun ;
Jung, Yoonseok ;
Kwon, Sunghoon .
SMALL, 2011, 7 (06) :796-803
[32]   Template-directed self-assembly of 10-μm-sized hexagonal plates [J].
Clark, TD ;
Ferrigno, R ;
Tien, J ;
Paul, KE ;
Whitesides, GM .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2002, 124 (19) :5419-5426
[33]   Inorganic light-emitting diode displays using micro-transfer printing [J].
Cok, Ronald S. ;
Meitl, Matthew ;
Rotzoll, Robert ;
Melnik, George ;
Fecioru, Alin ;
Trindade, Antonio Jose ;
Raymond, Brook ;
Bonafede, Salvatore ;
Gomez, David ;
Moore, Tanya ;
Prevatte, Carl ;
Radauscher, Erich ;
Goodwin, Scott ;
Hines, Paul ;
Bower, Christopher A. .
JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY, 2017, 25 (10) :589-609
[34]   Probing bulk and surface damage in widegap semiconductors [J].
Cunningham, W ;
Gouldwell, A ;
Lamb, G ;
Roy, P ;
Scott, J ;
Mathieson, K ;
Bates, R ;
Smith, KM ;
Cusco, R ;
Watson, IM ;
Glaser, M ;
Rahman, M .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2001, 34 (18) :2748-2753
[35]   Integrated Assembly and Flexible Movement of Microparts Using Multifunctional Bubble Microrobots [J].
Dai, Liguo ;
Lin, Daojing ;
Wang, Xiaodong ;
Jiao, Niandong ;
Liu, Lianqing .
ACS APPLIED MATERIALS & INTERFACES, 2020, 12 (51) :57587-57597
[36]   III-Nitride full-scale high-resolution microdisplays [J].
Day, Jacob ;
Li, J. ;
Lie, D. Y. C. ;
Bradford, Charles ;
Lin, J. Y. ;
Jiang, H. X. .
APPLIED PHYSICS LETTERS, 2011, 99 (03)
[37]   Competing fracture in kinetically controlled transfer printing [J].
Feng, Xue ;
Meitl, Matthew A. ;
Bowen, Audrey M. ;
Huang, Yonggang ;
Nuzzo, Ralph G. ;
Rogers, John A. .
LANGMUIR, 2007, 23 (25) :12555-12560
[38]  
Fonstad C. G. J, 2002, ADV MAT MICR NAN AMM, P1
[39]  
Freer EM, 2010, NAT NANOTECHNOL, V5, P525, DOI [10.1038/nnano.2010.106, 10.1038/NNANO.2010.106]
[40]   Tandem Organic Light-Emitting Diodes [J].
Fung, Man-Keung ;
Li, Yan-Qing ;
Liao, Liang-Sheng .
ADVANCED MATERIALS, 2016, 28 (47) :10381-10408