Ti/TiN multilayer coatings:: deposition technique, characterization and mechanical properties

被引：62

作者：

Dück, A ^{[1
]}

Gamer, N ^{[1
]}

Gesatzke, W ^{[1
]}

Griepentrog, M ^{[1
]}

Österle, W ^{[1
]}

Sahre, M ^{[1
]}

Urban, I ^{[1
]}

机构：

[1] Fed Inst Mat Res & Testing, BAM, Berlin, Germany

来源：

SURFACE & COATINGS TECHNOLOGY | 2001年 / 142卷

关键词：

Ti/TiN; multilayer; magnetron sputtering; mechanical properties; cross-sectional transmission electron microscopy (XTEM);

D O I：

10.1016/S0257-8972(01)01171-9

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Ti/TiN multilayer coatings with multilayer periods in the range 5-50 nm and a final thickness of 2 mum were deposited on steel substrates by cyclic modulation of nitrogen gas flow into the chamber of a PVD sputtering device. Coating characterization was performed by cross-sectional transmission electron microscopy, glancing-angle X-ray diffraction and instrumental indentation testing. Individual alpha -titanium and titanium nitride layers were always observed, although for the finer microstructures, the TiN layers were thicker than the Ti layers by a factor three. The plastic hardness of the films increased steadily with decreasing layer spacing, following a Hall-Petch relationship. Finally, a hardness value of 42 GPa was reached, which is similar to that of a thick TiN monolayer, prepared under the same coating conditions. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：579 / 584

页数：6

共 16 条

[1] Ti/TiN multilayers for hard coatings applications: In-situ characterization by real time spectroscopic ellipsometry [J].