A capacitive silicon microaccelerometer with force-balancing electrodes

被引:11
作者
Ha, B [1 ]
Oh, Y [1 ]
Song, C [1 ]
机构
[1] Samsung Adv Inst Technol, Microsyst Lab, Yongin 449900, South Korea
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1998年 / 37卷 / 12B期
关键词
surface micromachined; area variation; interdigital; differential; microacclerometer; force balancing; differential feedback electrodes;
D O I
10.1143/JJAP.37.7052
中图分类号
O59 [应用物理学];
学科分类号
摘要
A surface micromachined accelerometer, which senses an inertial motion with an area variation, has been developed. The accelerometer is designed as an interdigital rib structure that has a differential capacitor arrangement. The movable electrodes are mounted on a mass of 7 mu m thick polysilicon and a pair of stationary electrodes is formed under the mass with a 1.5 mu m gap. Both sides of the movable electrodes are fixed on the mass, and the stationary electrode is formed on the substrate without being suspended. As a result, the mechanical stress and the electrical pulling effects can be reduced in comparison to the comb-type capacitor arrangement. In order to improve the dynamic range and the linearity, a pair of comb-shaped force-balancing electrodes is placed on both sides of the mass. The force-balancing electrodes are fabricated on the: same layer as the mass and anchored on a silicon substrate. In particular, differential feedback electrodes enable linear control of mass repositioning.
引用
收藏
页码:7052 / 7057
页数:6
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