Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output Power

被引：284

作者：

Liu, Huicong ^{[1
]}

Tay, Cho Jui ^{[1
]}

Quan, Chenggen ^{[1
]}

Kobayashi, Takeshi ^{[2
]}

Lee, Chengkuo ^{[3
]}

机构：

[1] Natl Univ Singapore, Dept Mech Engn, Singapore 117576, Singapore

[2] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058564, Japan

[3] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2011年 / 20卷 / 05期

关键词：

Low-frequency vibrations; microelectromechanical systems (MEMS); piezoelectric energy harvester; piezoelectric thin film (PZT); wideband; GENERATOR; PERFORMANCE; FABRICATION; BIMORPH;

D O I：

10.1109/JMEMS.2011.2162488

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A piezoelectric MEMS energy harvester (EH) with low resonant frequency and wide operation bandwidth was designed, microfabricated, and characterized. The MEMS piezoelectric energy harvesting cantilever consists of a silicon beam integrated with piezoelectric thin film (PZT) elements parallel-arranged on top and a silicon proof mass resulting in a low resonant frequency of 36 Hz. The whole chip was assembled onto a metal carrier with a limited spacer such that the operation frequency bandwidth can be widened to 17 Hz at the input acceleration of 1.0 g during frequency up-sweep. Load voltage and power generation for different numbers of PZT elements in series and in parallel connections were compared and discussed based on experimental and simulation results. Moreover, the EH device has a wideband and steadily increased power generation from 19.4 nW to 51.3 nW within the operation frequency bandwidth ranging from 30 Hz to 47 Hz at 1.0 g. Based on theoretical estimation, a potential output power of 0.53 mu W could be harvested from low and irregular frequency vibrations by adjusting the PZT pattern and spacer thickness to achieve an optimal design. [2010-0346]

引用

页码：1131 / 1142

页数：12

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