Wear-resistant multilayered diamond-like carbon coating prepared by pulse biased arc ion plating

被引:28
作者
Huang, RF
Chan, CY
Lee, CH
Gong, J
Lai, KH
Lee, CS [1 ]
Li, KY
Wen, LS
Sun, C
机构
[1] City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
[2] Acad Sinica, Inst Met Res, Shenyang 110015, Peoples R China
关键词
diamond-like carbon (DLC); multi-layer coating; pulse arc ion plating;
D O I
10.1016/S0925-9635(01)00458-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond-like carbon coatings have been deposited by a pulse biased arc ion plating. In order to improve their adherence to metal substrate, two systems of graded transition layers, namely Ti/TiN/TiC and Ti/TiCN/TIC, have been applied. The structure and composition of the diamond-like carbon/transition composite coatings were studied by scanning electron microscopy, Raman spectroscopy and energy dispersive X-ray spectroscopy. The total thickness of the coatings was within a range of 1.0-2.0 mum. Such multi-layer coatings showed excellent properties including high hardness, low friction coefficient and long wear-resistant lifetime. Diamond like carbon coatings as well as their wear tracks developed by sliding steel balls have been investigated by scanning electron microscopy. The results of the analysis, particularly that of the tribological study showed that the wear resistance and film-to-substrate adherence of diamond like carbon coatings with stainless steel surface were dramatically improved by using a graded transition layer and pulse biased arc ion plating. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1850 / 1854
页数:5
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