Comparative analysis of thin Ni and CoNiMnP magnetic films

被引:13
作者
Campos, C. D. M.
Flacker, A. [1 ]
Moshkalev, S. A. [1 ]
Nobrega, E. G. O.
机构
[1] Univ Estadual Campinas, Ctr Semicond Components, Campinas, SP, Brazil
基金
巴西圣保罗研究基金会;
关键词
Magnetic properties; Metallic films; Electroplating;
D O I
10.1016/j.tsf.2012.03.022
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The results of an investigation of thin Ni and CoNiMnP films deposited by electroplating over polyurethane-acrylate flexible substrates are presented. To improve magnetic properties of the films, an electroplating process was carried out with assistance of a strong magnetic field (3900 G). The evaluated film properties were coercivity, remanence, maximum energy product, adherence and film composition. Comparison between the magnetic properties of the samples has shown that Ni and CoNiMnP films are suitable for distinct areas of applications in micro-devices: vibrating diaphragms and micro-magnet machines, respectively. (c) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码:4871 / 4874
页数:4
相关论文
共 26 条
[1]  
[Anonymous], 2009, D3359 ASTM INT, DOI [10.1520/D3359-09E02, DOI 10.1520/D3359-09E02]
[2]   Permanent Magnets for MEMS [J].
Arnold, David P. ;
Wang, Naigang .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2009, 18 (06) :1255-1266
[3]   Magnetic field effects on electrochemical metal depositions [J].
Bund, Andreas ;
Ispas, Adriana ;
Mutschke, Gerd .
SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS, 2008, 9 (02)
[4]  
Buschow K.H.J., 1997, HDB MAGNETIC MAT
[5]   Electroplated Nickel Permanent Magnetic Films over Polymeric Membranes [J].
Campos, C. D. M. ;
Flacker, A. ;
Vaz, A. R. ;
Moshkalev, S. A. ;
Nobrega, E. G. O. .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2011, 158 (06) :D330-D334
[6]   Theoretical analysis and optimization of electromagnetic actuation in a valveless microimpedance pump [J].
Chang, Hsien-Tsung ;
Lee, Chia-Yen ;
Wen, Chih-Yung ;
Hong, Boe-Shong .
MICROELECTRONICS JOURNAL, 2007, 38 (6-7) :791-799
[7]   Design, analysis and optimization of an electromagnetic actuator for a micro impedance pump [J].
Chang, Hsien-Tsung ;
Wen, Chih-Yung ;
Lee, Chia-Yen .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 19 (08)
[8]   Electroplated thick permanent magnet arrays with controlled direction of magnetization for MEMS application [J].
Cho, HJ ;
Bhansali, S ;
Ahn, CH .
JOURNAL OF APPLIED PHYSICS, 2000, 87 (09) :6340-6342
[9]   EXPANDED CONTACTS AND INTERCONNEXIONS TO MONOLITHIC SILICON INTEGRATED CIRCUITS [J].
CUNNINGHAM, JA .
SOLID-STATE ELECTRONICS, 1965, 8 (09) :735-+
[10]  
Dubin V.M., 2001, THIN SOLID FILMS, V387, P155