Design of Self-adaptive Fuzzy-PID Controller Based on DSP and FPGA for Rapid Thermal Processing

The features of RTP (rapid thermal processing) temperature control system are analyzed. Regarding TI's DSP chip TMS320LF2407A as the main chip, adopted FPGA for logical and sequential control, temperature controller based on DSP and FPGA has been designed. DSP is used as executing temperature control algorithms and FPGA as logic unit for temperature sampling and display. The hardware configuration and principle is introduced firstly, and then the temperature control algorithm based on self-adaptive fuzzy-PID is designed. Finally, the simulation and experiment results show that the self-adaptive fuzzy-PID controller based on DSP and FPGA has good robustness, rapidity and good dynamic performance. Besides, the structure of hardware design based on DSP and FPGA has four prominent features such as modularization, flexibility, timing and extensibility.