Effect of pulse Nd-YAG laser beam interaction on annealing of nanopowder ITO using spin-on-glass

被引：10

作者：

Amoli, H. Salar ^{[1
]}

Fathi, B. ^{[1
]}

机构：

[1] Iranian Res Org Sci & Technol, Fac Chem Ind, Tehran, Iran

来源：

JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY | 2011年 / 59卷 / 01期

关键词：

Nanopowder ITO; Pulse Nd-YAG laser; Spin coating; Glass; Annealing; INDIUM-TIN-OXIDE; THIN-FILM; OPTICAL-PROPERTIES; DEPOSITION; BOTTOM;

D O I：

10.1007/s10971-011-2457-0

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The effect of pulse Nd-YAG laser on structural and electrical properties of ITO thin film on glass by spin coating process was evaluated. It was found that the beam interaction of pulse laser energy has a significant effect on crystallization, conductivity and optical properties of ITO. Laser irradiation with a wavelength of 1,064 nm and energy of 8-40 J are employed. The conventional X-Ray diffraction studies show the peak intensities of (211), (222), and (440) planes increased by using Nd-YAG laser treatment and prove the crystallization of ITO nanoparticle. Due to absorption of millisecond pulse laser, the resistivity of ITO coating on glass substrate which was annealed at 350 A degrees C, reduced by a factor of 100, and a resistance of less than 0.6 ka"broken vertical bar has been achieved.

引用

页码：32 / 35

页数：4

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