TEMPERATURE EFFECTS ON CHARACTERISTICS OF MEMS BASED ELECTROCHEMICAL SEISMIC SENSORS FOR LINEAR MOTION DETECTING

被引：0

作者：

Deng, T. ^{[1
,2
]}

Chen, D. Y. ^{[1
,2
]}

Wang, J. B. ^{[1
,2
]}

Chen, J. ^{[1
]}

Li, G. L. ^{[1
,2
]}

Zhang, Z. Y. ^{[1
,2
]}

Sun, Z. Y. ^{[1
,2
]}

机构：

[1] Chinese Acad Sci, Inst Elect, Beijing, Peoples R China

[2] Univ Chinese Acad Sci, Beijing, Peoples R China

来源：

2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2015年

关键词：

Temperature effects; MEMS; seismic sensor; electrochemical approach;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper first investigates the mechanism of the temperature effects on characteristics of MEMS based electrochemical seismic sensors for linear motion detecting both by numerical simulation and experimental methods. Both the simulation and experimental results indicates that the device sensitivity increases with temperature and the tendency of the device frequency response remains the same under different temperatures, providing crucial information for further electronic compensation. The average device temperature sensitivity at different frequency points obtained by the simulation and the experiment is 1.30%/degrees C and 1.88%/degrees C (compared with the device sensitivity), respectively, indicating that the intensified electrochemical reaction caused by the increasing temperature is the primary factor (69%) for the increasing device sensitivity and the thermal effects on the electrolyte solution flow and the ion transfer are the secondary factors.

引用

页码：1140 / 1143

页数：4