TEMPERATURE EFFECTS ON CHARACTERISTICS OF MEMS BASED ELECTROCHEMICAL SEISMIC SENSORS FOR LINEAR MOTION DETECTING

This paper first investigates the mechanism of the temperature effects on characteristics of MEMS based electrochemical seismic sensors for linear motion detecting both by numerical simulation and experimental methods. Both the simulation and experimental results indicates that the device sensitivity increases with temperature and the tendency of the device frequency response remains the same under different temperatures, providing crucial information for further electronic compensation. The average device temperature sensitivity at different frequency points obtained by the simulation and the experiment is 1.30%/degrees C and 1.88%/degrees C (compared with the device sensitivity), respectively, indicating that the intensified electrochemical reaction caused by the increasing temperature is the primary factor (69%) for the increasing device sensitivity and the thermal effects on the electrolyte solution flow and the ion transfer are the secondary factors.