A transparent metal:: Nb-doped anatase TiO2 -: art. no. 252101

被引:695
作者
Furubayashi, Y [1 ]
Hitosugi, T
Yamamoto, Y
Inaba, K
Kinoda, G
Hirose, Y
Shimada, T
Hasegawa, T
机构
[1] Kanagawa Acad Sci & Technol, KAST, Kawasaki, Kanagawa 2130012, Japan
[2] Univ Tokyo, Dept Chem, Tokyo 1130033, Japan
[3] Tokyo Inst Technol, Frontier Collaborat Res Ctr, Yokohama, Kanagawa 2268503, Japan
关键词
D O I
10.1063/1.1949728
中图分类号
O59 [应用物理学];
学科分类号
摘要
This Letter focuses on the discovery of a transparent conducting oxide (TCO), anatase Ti1-xNbxO2 films with x=0.002-0.2. The resistivity of films with x >= 0.03 is 2-3x10(-4) Omega cm at room temperature. The carrier density of Ti1-xNbxO2 can be controlled in a range of 1x10(19) to 2x10(21) cm(-3). The internal transmittance for films with x <= 0.03 (40 nm thickness) is about 97% in the visible light region. The transport and optical parameters are comparable to those of typical TCOs, such as In2-xSnxO3 and ZnO. (c) 2005 American Institute of Physics.
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页码:1 / 3
页数:3
相关论文
共 11 条
[1]   ELECTROCHEMICAL PHOTOLYSIS OF WATER AT A SEMICONDUCTOR ELECTRODE [J].
FUJISHIMA, A ;
HONDA, K .
NATURE, 1972, 238 (5358) :37-+
[2]   Transparent conducting oxides [J].
Ginley, DS ;
Bright, C .
MRS BULLETIN, 2000, 25 (08) :15-18
[3]   EVAPORATED SN-DOPED IN2O3 FILMS - BASIC OPTICAL-PROPERTIES AND APPLICATIONS TO ENERGY-EFFICIENT WINDOWS [J].
HAMBERG, I ;
GRANQVIST, CG .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (11) :R123-R159
[4]  
Heavens O. S., 1991, Optical Properties of Thin Solid Films, P46
[5]   Conductivity in transparent anatase TiO2 films epitaxially grown by reactive sputtering deposition [J].
Jeong, BS ;
Norton, DP ;
Budai, JD .
SOLID-STATE ELECTRONICS, 2003, 47 (12) :2275-2278
[6]   Applications and processing of transparent conducting oxides [J].
Lewis, BG ;
Paine, DC .
MRS BULLETIN, 2000, 25 (08) :22-27
[7]   New n-type transparent conducting oxides [J].
Minami, T .
MRS BULLETIN, 2000, 25 (08) :38-44
[8]   XAS investigation of tantalum and niobium in nanostructured TiO2 anatase [J].
Sacerdoti, M ;
Dalconi, MC ;
Carotta, MC ;
Cavicchi, B ;
Ferroni, M ;
Colonna, S ;
Di Vona, ML .
JOURNAL OF SOLID STATE CHEMISTRY, 2004, 177 (06) :1781-1788
[9]   STUDY OF THE EFFECT OF ION-IMPLANTATION ON THE ELECTRICAL AND MICROSTRUCTURAL PROPERTIES OF TIN-DOPED INDIUM OXIDE THIN-FILMS [J].
SHIGESATO, Y ;
PAINE, DC ;
HAYNES, TE .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (08) :3805-3811
[10]  
Tang H., 1977, SOLID STATE COMMUN, V23, P161