Design and Fabrication of Air-Based 1-3 Piezoelectric Composite Transducer for Air-Coupled Ultrasonic Applications

被引:16
作者
He, Cunfu [1 ]
Wang, Yaoyao [1 ]
Lu, Yan [1 ]
Liu, Yuepeng [1 ]
Wu, Bin [1 ]
机构
[1] Beijing Univ Technol, Coll Mech Engn & Appl Elect Technol, Beijing 100124, Peoples R China
基金
中国国家自然科学基金;
关键词
CRACK DETECTION; LAMB WAVES; CONNECTIVITY; INSPECTION; DAMAGE; MODE;
D O I
10.1155/2016/4982616
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Theair-based 1-3 piezoelectric composite transducers are designed and fabricated in order to solve the acoustic impedance matching problem. Firstly, a finite element model using honeycomb structure as the piezoelectric composite matrix is built to reduce the acoustic impedance of the sensitive element. Three important factors, volume fraction of piezoelectric materials phi, the thickness h, and the size.. of the square cross section of piezoelectric column, are examined and verified in simulation. Then, according to the result of simulation, the piezoelectric composites and the air-coupled transducers are fabricated. The honeycomb structures of resin are produced by the method of 3D printing technology, with the volume fraction of air being 30%. The impedance characteristics and the excitation/reception performance of the air-coupled transducers are measured and optimized. Meanwhile, a scanning experiment is carried out to demonstrate the crack detection process inmonocrystalline silicon. A(0) mode of Lamb waves is excited and collected. The location and size of the defect will be determined by calculating the correlation coefficients of the received signals and reference signals. Finally, a 15 mm x 0.5 mm x 0.5 mm scratch is clearly distinguished.
引用
收藏
页数:11
相关论文
共 21 条
[1]   High-Spatial-Resolution Sub-Surface Imaging Using a Laser-Based Acoustic Microscopy Technique [J].
Balogun, Oluwaseyi ;
Cole, Garrett D. ;
Huber, Robert ;
Chinn, Diane ;
Murray, Todd W. ;
Spicer, James B. .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2011, 58 (01) :226-233
[2]   Crack detection and analyses using resonance ultrasonic vibrations in full-size crystalline silicon wafers [J].
Belyaev, A ;
Polupan, O ;
Dallas, W ;
Ostapenko, S ;
Hess, D ;
Wohlgemuth, J .
APPLIED PHYSICS LETTERS, 2006, 88 (11)
[3]  
Bhardwaj M., 2003, Piezoelectric transducer with gas matrix, Patent No. [WO2004017369 A2, 2007, 2004017369]
[4]   Single sided inspection of composite materials using air coupled ultrasound [J].
Castaings, M ;
Cawley, P ;
Farlow, R ;
Hayward, G .
JOURNAL OF NONDESTRUCTIVE EVALUATION, 1998, 17 (01) :37-45
[5]   Spatial correlation coefficient images for ultrasonic detection [J].
Cepel, Raina ;
Ho, K. C. ;
Rinker, Brett A. ;
Palmer, Donald D., Jr. ;
Lerch, Terrence P. ;
Neal, Steven P. .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2007, 54 (09) :1841-1850
[6]   Crack Detection in Full Size Cz-Silicon Wafers Using Lamb Wave Air Coupled Ultrasonic Testing (LAC-UT) [J].
Chakrapani, Sunil Kishore ;
Padiyar, M. Janardhan ;
Balasubramaniam, Krishnan .
JOURNAL OF NONDESTRUCTIVE EVALUATION, 2012, 31 (01) :46-55
[7]  
GURURAJA TR, 1984, FERROELECTRICS, V54, P523
[8]   Assessing the influence of pillar aspect ratio on the behavior of 1-3 connectivity composite transducers [J].
Hayward, G ;
Bennett, J .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1996, 43 (01) :98-108
[9]   FINITE-ELEMENT MODELING OF ACTIVE PERIODIC STRUCTURES - APPLICATION TO 1-3 PIEZOCOMPOSITES [J].
HLADKYHENNION, AC ;
DECARPIGNY, JN .
JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1993, 94 (02) :621-635
[10]   Using air-coupled sensors to determine the depth of a surface-breaking crack in concrete [J].
Kee, Seong-Hoon ;
Zhu, Jinying .
JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 2010, 127 (03) :1279-1287