Spin-dependent recombination in Czochralski silicon containing oxide precipitates

被引:19
作者
Lang, V. [1 ]
Murphy, J. D. [1 ]
Falster, R. J. [1 ,2 ]
Morton, J. J. L. [1 ,3 ]
机构
[1] Univ Oxford, Dept Mat, Oxford OX1 3PH, England
[2] MEMC Elect Mat Inc, I-28100 Novara, Italy
[3] Univ Oxford, Dept Phys, Clarendon Lab, CAESR, Oxford OX1 3PU, England
基金
英国工程与自然科学研究理事会;
关键词
OXYGEN PRECIPITATION; PARAMAGNETIC DEFECTS; INTERFACE DEFECTS; RESONANCE; CENTERS; IRON; CRYSTALS; FEATURES; SI/SIO2; SI;
D O I
10.1063/1.3675449
中图分类号
O59 [应用物理学];
学科分类号
摘要
Electrically detected magnetic resonance is used to identify recombination centers in a set of Czochralski-grown silicon samples processed to contain strained oxide precipitates with a wide range of densities (similar to 1 x 10(9) cm(-3) to similar to 7 x 10(10) cm(-3)). Measurements reveal that photo-excited charge carriers recombine through P-b0 and P-b1 dangling bonds, and comparison to precipitate-free material indicates that these are present at both the sample surface and the oxide precipitates. The electronic recombination rates vary approximately linearly with precipitate density. Additional resonance lines arising from iron-boron and interstitial iron are observed and discussed. Our observations are inconsistent with bolometric heating and interpreted in terms of spin-dependent recombination. Electrically detected magnetic resonance is thus a very powerful and sensitive spectroscopic technique to selectively probe recombination centers in modern photovoltaic device materials. (C) 2012 American Institute of Physics. [doi: 10.1063/1.3675449]
引用
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页数:7
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