Precession x-ray ptychography with multislice approach

被引:24
作者
Shimomura, Kei
Suzuki, Akihiro
Hirose, Makoto
Takahashi, Yukio [1 ]
机构
[1] Osaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
来源
PHYSICAL REVIEW B | 2015年 / 91卷 / 21期
关键词
DIFFRACTION MICROSCOPY; COMPUTED-TOMOGRAPHY; RESOLUTION; NANOSCALE; STRAIN; WHOLE;
D O I
10.1103/PhysRevB.91.214114
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We experimentally demonstrate a three-dimensional x-ray ptychography in combination with precession measurements that can reconstruct multisection images of optically thick objects. We collect a tilt-series ptychographic diffraction data set of a four-layered object and then successfully reconstruct the phase images of each layer by using an improved phase retrieval algorithm with a multislice approach. The present method has great potential for nondestructively determining anisotropic structures in materials science and biology.
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页数:5
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