Optical properties of polymerized ethylene thin films deposited by PECVD technique

被引:2
作者
Sakli, A. [1 ,2 ]
Amri, R. [1 ,2 ,3 ]
Lelong, A. [2 ]
Gamra, D. [1 ]
Bouchriha, H. [1 ]
Lejeune, M. [2 ]
Clin, M. [2 ]
机构
[1] Univ Tunis El Manar, Fac Sci Tunis, Lab Mat Avances & Phenomenes Quant, Campus Univ, Tunis 1068, Tunisia
[2] Univ Picardie Jules Verne, UFR Sci, Lab Phys Mat Condensee, 33 Rue St Leu, F-80039 Amiens, France
[3] Univ Arabe Sci, Ecole Super Ingn & Etud Technol, Tunis 1002, Tunisia
关键词
Polyethylene thin film; PECVD; Optical gap; Optical conductivity; Radiofrequency power; PHOTONIC BAND-GAP; POLYETHYLENE; HMDSO; DEFECTS; MIXTURE;
D O I
10.1007/s11082-021-03194-2
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Optical properties of polymerized polyethylene layers deposited on glass substrates by PECVD technique at different radio frequency powers are studied through transmission and reflection spectra. Analysis of the experimental spectra by using conventional classic models which permit the determination of optical constants as the refractive index n, the dielectric permittivity epsilon, the extinction k and absorption coefficients alpha which leads to the optical parameters characterizing the layers such as static refractive index n(s),permittivity epsilon(s), plasmon frequency omega(p), carrier density to effective mass ratio N/m*(e),optical conductivity sigma(op), optical band gap E-g and dispersion diffusion energies E-0 and E-d. These different values permit to select the suitable power for elaborate layers with performant properties for various applications in the field of communication, electrical isolation, and miniaturized optoelectronics and sensors devices.
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页数:13
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