Characterization of Zr-Al-N films synthesized by a magnetron sputtering method

被引:38
作者
Makino, Y
Mori, M
Miyake, S
Saito, K
Asami, K
机构
[1] Osaka Univ, Joining & Welding Res Inst, Ibaraki 5670047, Japan
[2] Tohoku Univ, Inst Mat Res, LAM, Sendai, Miyagi 9808577, Japan
关键词
Zr-Al-N system; hardness; phase change; band parameters;
D O I
10.1016/j.surfcoat.2004.07.036
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Pseudobinary Zr-Al-N films were synthesized by an inductively combined rf-plasma-assisted magnetron sputtering for the purpose of examining the prediction on the phase change in the T (transition metal)-Al-N pseudobinary system based on band parameters. Phase change from B1 structure to B4 was not verified by XRD and FTIR methods. Microhardness of these films showed a maximum hardness of about 46 GPa at the content of 30% AlN and then decreased drastically to about 28 GPa at the content of 35% AlN. The AlN content for the drastic change showed good agreement with the critical content predicted based on band parameters. Under the assumption that the drastic change of microhardness corresponds to the B1-B4 phase change, it is interpreted that appearance of two XRD peaks near 2 theta=32 degrees and 2 theta=38 degrees is attributed to the formation of the Zr-Al-N films with B1 structure. On the other hand, single XRD peak 2 theta=38 degrees in the Zr-Al-N film with ZrN/AlN=65:35 is assigned to B4 phase. Further, the existence of some amount of the B4 phase in the Zr-Al-N film with ZrN/AlN=70:30-80:20 is suggested from broadness in XRD peaks. (c) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:219 / 222
页数:4
相关论文
共 24 条
[1]   DESIGN AND CHARACTERIZATION OF A COMPACT 2-TARGET ULTRAHIGH-VACUUM MAGNETRON SPUTTER DEPOSITION SYSTEM - APPLICATION TO THE GROWTH OF EPITAXIAL TI1-XALXN ALLOYS AND TIN/TI1-XALXN SUPERLATTICES [J].
ADIBI, F ;
PETROV, I ;
GREENE, JE ;
WAHLSTROM, U ;
SUNDGREN, JE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (01) :136-142
[2]   CALCULATION OF BULK MODULI OF DIAMOND AND ZINCBLENDE SOLIDS [J].
COHEN, ML .
PHYSICAL REVIEW B, 1985, 32 (12) :7988-7991
[3]   Characteristics of (Cr1-x,Alx)N films prepared by pulsed laser deposition [J].
Hirai, M ;
Ueno, Y ;
Suzuki, T ;
Jiang, WH ;
Grigoriu, C ;
Yatsui, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (2B) :1056-1060
[4]  
IKEDA T, 1991, THIN SOLID FILMS, V195, P99, DOI 10.1016/0040-6090(91)90262-V
[5]   Microhardness and lattice parameter of Cr1-xAlxN films [J].
Kawate, M ;
Kimura, A ;
Suzuki, T .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2002, 20 (02) :569-571
[6]   Effects of Al content on hardness, lattice parameter and microstructure of Ti1-xAlxN films [J].
Kimura, A ;
Hasegawa, H ;
Yamada, K ;
Suzuki, T .
SURFACE & COATINGS TECHNOLOGY, 1999, 120 :438-441
[7]   ANALYTIC RELATION BETWEEN BULK MODULI AND LATTICE-CONSTANTS [J].
LAM, PK ;
COHEN, ML ;
MARTINEZ, G .
PHYSICAL REVIEW B, 1987, 35 (17) :9190-9194
[8]   MATERIALS POTENTIALLY HARDER THAN DIAMOND - QUENCHABLE HIGH-PRESSURE PHASES OF TRANSITION-METAL DIOXIDES [J].
LEGER, JM ;
HAINES, J ;
BLANZAT, B .
JOURNAL OF MATERIALS SCIENCE LETTERS, 1994, 13 (23) :1688-1690
[9]   Application of band parameters to materials design [J].
Makino, Y .
ISIJ INTERNATIONAL, 1998, 38 (09) :925-934
[10]   Estimation of bulk moduli of compounds by empirical relations between bulk modulus and interatomic distance [J].
Makino, Y ;
Miyake, S .
JOURNAL OF ALLOYS AND COMPOUNDS, 2000, 313 (1-2) :235-241