Design and Operation of a Fabry-Perot-Based MWIR Microspectrometer

被引：2

作者：

Ebermann, Martin ^{[1
]}

Neumann, Norbert ^{[1
]}

机构：

[1] InfraTec GmbH, D-01217 Dresden, Germany

来源：

TM-TECHNISCHES MESSEN | 2010年 / 77卷 / 06期

关键词：

MEMS Fabry-Perot interferometer; MWIR microspectrometer; tunable infrared detector; infrared spectroscopy; SENSOR;

D O I：

10.1524/teme.2010.0021

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

There is a large potential in the field of infrared absorption spectroscopy, particularly if multicomponent mixtures have to be analyzed. A microspectrometer for the spectral range 3-5 mu m is presented, which is based on a pyroelectric detector with an integrated MEMS Fabry-Perot filter. The influence of different optical set-ups on the spectral resolution and the signal-to-noise ratio are discussed.

引用

页码：325 / 332

页数：8

共 11 条

[1]

ANTOSZEWSKI J, 2006, P SPIE, V6186

[2]

Gu'nzler H., 2003, IR SPEKTROSKOPIE

[3] Infrared micro-spectrometer based on a diffraction grating [J].