Low-Temperature Atmospheric Pressure Plasma-Enhanced CVD of Nanocomposite Coatings "Molybdenum Disulfide (Filler)-Silicon Oxide (Matrix)"

被引：10

作者：

Alexandrov, Sergey E. ^{[1
]}

Tyurikov, Kirill S. ^{[1
]}

Kirilenko, Demid A. ^{[2
]}

Redkov, Alexey V. ^{[3
]}

Lipovskii, Andrey A. ^{[4
]}

机构：

[1] Peter Great St Petersburg Polytech Univ, Politekhnicheskaya 29, St Petersburg 195251, Russia

[2] Russian Acad Sci, Ioffe Phys Tech Inst, Politekhnicheskaya 26, St Petersburg 194021, Russia

[3] Inst Problems Mech Engn, VO Bolshoj Prosp 61, St Petersburg 199178, Russia

[4] St Petersburg Acad Univ, Khlopina 8-3, St Petersburg 194021, Russia

来源：

ADVANCED MATERIALS INTERFACES | 2017年 / 4卷 / 18期

基金：

俄罗斯科学基金会;

关键词：

chemical vapor deposition; molybdenum disulfide; nanocomposites; silicon oxide; CHEMICAL-VAPOR-DEPOSITION; THIN-FILMS; GAS-PHASE; NANOPARTICLES; PARTICLES; SILICON; SPRAY;

D O I：

10.1002/admi.201700241

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The possibility of practical realization of a two-stage chemical vapor deposition (CVD) process using as an example of nanocomposite coating molybdenum disulfide (filler)-silicon oxide (matrix) is experimentally demonstrated for the first time. Deposition is performed in a two-zone vertical tubular quartz reactor. The formation of molybdenum disulfide nanoparticles by spray pyrolysis is carried out in the upper zone, and the lower zone is used for deposition of nanocomposite coatings by atmospheric pressure plasma-enhanced CVD. An aerosol of the ammonium thiomolybdate solution in dimethylformamide is used for the synthesis of molybdenum disulfide particles, and silicon dioxide coatings are deposited from tetraethoxysilane. The structure and the composition of nanocomposite coating deposited are studied using scanning electron microscopy (SEM), transmission electron microscopy (TEM), Raman, and Fourier transform infrared spectroscopy (FTIR) spectroscopy.

引用

页数：7

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