Thermal oxidation of CVD diamond

被引：44

作者：

Zolotukhin, Aleksey ^{[1
]}

Kopylov, Petr G. ^{[2
]}

Ismagilov, Rinat R. ^{[1
,2
]}

Obraztsov, Alexander N. ^{[1
,2
]}

机构：

[1] Univ Joensuu, Dept Math & Phys, FIN-80101 Joensuu, Finland

[2] Moscow MV Lomonosov State Univ, Dept Phys, Moscow 119991, Russia

来源：

关键词：

Diamond; Chemical vapor deposition; Thermal oxidation;

D O I：

10.1016/j.diamond.2010.03.005

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A thermal oxidation process of diamond films grown by chemical vapor deposition (CVD) has been studied. The oxidation was realized via heating of the CVD films in air. Pristine and oxidized CVD diamond films were analyzed with Raman spectroscopy and scanning electron microscopy (SEM) techniques. Raman spectroscopy revealed substantial changes in the polycrystalline diamond film composition induced by oxidation. A selective oxidation of disordered carbon and small size diamond crystallites was obtained at appropriate temperatures. A model explaining the formation and oxidation of the CVD diamond films containing the micrometer single diamond cores surrounded by the nanocrystalline diamond and disordered carbon has been proposed on the basis of the obtained results. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：1007 / 1011

页数：5

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