Thermoelectric gas sensor for detection of high hydrogen concentration

被引:45
作者
Shin, W [1 ]
Matsumiya, M
Qiu, F
Izu, N
Murayama, N
机构
[1] AIST, Synergy Mat Res Ctr, Moriyama Ku, Nagoya, Aichi 4638560, Japan
[2] Jilin Univ, Sch Elect Sci & Engn, Dept Elect Sci & Technol, Changchun 130023, Peoples R China
关键词
thermoelectric; gas sensor; catalyst; hydrogen; air mixing;
D O I
10.1016/j.snb.2003.08.029
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Using a thermoelectric gas sensor, a method to detect wide range and high-concentration hydrogen was developed. The thermoelectric gas sensor was fabricated by depositing platinum catalyst thin film on the half surface of nickel oxide thick film. The sensor detected hydrogen for the concentration from 0.025 to 10% in air, with a good linearity of voltage signal versus gas concentration. By coupling this sensor and the air mixing set-up, high hydrogen concentration gas of range up to 100% (1 atm H-2) balanced with nitrogen was measured with a good linearity. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码:344 / 347
页数:4
相关论文
共 14 条
[1]   OPTICAL FIBER HYDROGEN SENSOR [J].
BUTLER, MA .
APPLIED PHYSICS LETTERS, 1984, 45 (10) :1007-1009
[2]   SOLID-STATE SENSORS FOR TRACE HYDROGEN GAS-DETECTION [J].
CHRISTOFIDES, C ;
MANDELIS, A .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (06) :R1-R30
[3]   THIN-FILMS OF PD/NI ALLOYS FOR DETECTION OF HIGH HYDROGEN CONCENTRATIONS [J].
HUGHES, RC ;
SCHUBERT, WK .
JOURNAL OF APPLIED PHYSICS, 1992, 71 (01) :542-544
[4]   H2 selective gas sensor based on SnO2 [J].
Katsuki, A ;
Fukui, K .
SENSORS AND ACTUATORS B-CHEMICAL, 1998, 52 (1-2) :30-37
[5]   HYDROGEN-SENSITIVE MOS FIELD-EFFECT TRANSISTOR [J].
LUNDSTROEM, I ;
SHIVARAMAN, S ;
SVENSSON, C ;
LUNDKVIST, L .
APPLIED PHYSICS LETTERS, 1975, 26 (02) :55-57
[6]   Nano-structured thin-film Pt catalyst for thermoelectric hydrogen gas sensor [J].
Matsumiya, M ;
Shin, W ;
Izu, N ;
Murayama, N .
SENSORS AND ACTUATORS B-CHEMICAL, 2003, 93 (1-3) :309-315
[7]   Thin-film Li-doped NiO for thermoelectric hydrogen gas sensor [J].
Matsumiya, M ;
Qiu, F ;
Shin, W ;
Izu, N ;
Murayama, N ;
Kanzaki, S .
THIN SOLID FILMS, 2002, 419 (1-2) :213-217
[8]  
MATSUMIYA M, IN PRESS SENS ACTU B
[9]   TIN DIOXIDE GAS SENSORS - USE OF THE SEEBECK EFFECT [J].
MCALEER, JF ;
MOSELEY, PT ;
BOURKE, P ;
NORRIS, JOW ;
STEPHAN, R .
SENSORS AND ACTUATORS, 1985, 8 (03) :251-257
[10]   Investigation of thermoelectric hydrogen sensor based on SiGe film [J].
Qiu, FB ;
Matsumiya, M ;
Shin, W ;
Izu, N ;
Murayama, N .
SENSORS AND ACTUATORS B-CHEMICAL, 2003, 94 (02) :152-160