Vacuum technology applied to solid state chemical sensors, processing, characterization and applications

被引：2
|
作者：
Spetz, Anita Lloyd [1 ]
机构：
[1] Linkoping Univ, Div Phys Chem & Biol, SE-58183 Linkoping, Sweden
来源：
VACUUM | 2012年 / 86卷 / 05期
基金：
瑞典研究理事会;
关键词：
Solid state sensors; FET sensors; Metal oxide sensors; Surface plasmon resonance; Impedance sensors; Microcalorimeters; Graphene-based sensors; GAS SENSORS; THIN-FILMS; HYDROGEN; PD; SENSITIVITY; ADSORPTION; SPILLOVER; H-2;
D O I：
10.1016/j.vacuum.2011.08.013
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This chapter will review several solid state chemical sensors with focus on the importance of ultra high vacuum, UHV, for the development of this area. Examples of sensors will be given where processing of sensors and sensing layers as well as characterization of chemical sensors takes place in UHV as well as examples of sensors for operation in UHV. Applications of chemical sensors both already commercialized and still on the research level will be given. Sensor technologies will span from metal oxide sensors, field effect transistor sensors to surface plasmon resonance, SPR, sensors and microcalorimeters. Examples of new challenging novel sensor approaches like sensors based on indirect SPR sensing and ultra sensitive graphene-based sensors for NO2 detection will also be given. (C) 2011 Elsevier Ltd. All rights reserved.
引用
收藏
页码：488 / 494
页数：7
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