Fabrication of x-ray absorption gratings via deep x-ray lithography using a conventional x-ray tube

被引：6

作者：

Pinzek, Simon ^{[1
,2
]}

Beckenbach, Thomas ^{[3
]}

Viermetz, Manuel ^{[1
,2
]}

Meyer, Pascal ^{[4
]}

Gustschin, Alex ^{[1
,2
]}

Andrejewski, Jana ^{[1
,2
]}

Gustschin, Nikolai ^{[1
,2
]}

Herzen, Julia ^{[1
,2
]}

Schulz, Joachim ^{[3
]}

Pfeiffer, Franz ^{[1
,2
,5
]}

机构：

[1] Tech Univ Munich, Sch Nat Sci, Dept Phys, Biomed Phys, Garching, Germany

[2] Tech Univ Munich, Munich Inst Biomed Engn, Garching, Germany

[3] Microworks GmbH, Karlsruhe, Germany

[4] Karlsruhe Inst Technol, Inst Microstruct Technol, Eggenstein Leopoldshafen, Germany

[5] Tech Univ Munich, Sch Med & Klinikum Rechts Isar, Dept Diagnost & Intervent Radiol, Munich, Germany

来源：

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 | 2021年 / 20卷 / 04期

基金：

欧洲研究理事会;

关键词：

deep x-ray lithography; LIGA; x-ray tube; absorption grating; PHASE-CONTRAST; QUALITY;

D O I：

10.1117/1.JMM.20.4.043801

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Background: X-ray grating interferometry is an emerging imaging technique that strongly relies on fine grating structures. A common method to fabricate compatible gratings is deep x-ray lithography (DXRL). Aim: To develop a method to fabricate grating structures by DXRL, which does not require a synchrotron source. Approach: The synchrotron source is replaced by a conventional x-ray tube. The fabrication process is adapted for the divergent beam by cylindrically bending mask and substrate. Results: A 10-mu m period absorption grating with 80-mu m-thick gold lamellae is successfully fabricated from an intermediate 110-mu m high structured resist. This grating is characterized and implemented in a preclinical Talbot-Lau interferometer designed for medical thorax imaging. Conclusion: This approach can overcome the strong dependence on synchrotron facilities for the fabrication of gratings for x-ray grating interferometry. As x-ray tubes are more widely available, this is a cost-efficient and scalable alternative suitable for industrial production. (C) 2021 Society of Photo-Optical Instrumentation Engineers (SPIE)

引用

页数：12

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