Performance of a biaxial MEMS-based scanner for microdisplay applications

被引：62

作者：

Wine, DW ^{[1
]}

Helsel, MP ^{[1
]}

Jenkins, L ^{[1
]}

Urey, H ^{[1
]}

Osborn, TD ^{[1
]}

机构：

[1] Microvis Inc, Bothell, WA 98011 USA

来源：

MOEMS AND MINIATURIZED SYSTEMS | 2000年 / 4178卷

关键词：

scanner; MEMS; biaxial; resolution; RSD; display; SVGA;

D O I：

10.1117/12.396487

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Scanned displays have potential for achieving high brightness and see-through configurations in many display applications. A MEMS-based solution based on these tradeoffs for SVGA level performance is presented, with test data illustrating optical, mechanical, and electrical performance. Comparisons of this scanner against video requirements and other scanners previously reported are illustrated. The feasibility of MEMS-based scanners for Retinal Scanning Displays (RSD) and other applications is discussed, with extension to higher video performance standards.

引用

页码：186 / 196

页数：11

共 10 条

[1] CONANT R, 1999, IEEE TRANSD 1999 SEN, P376
[2] DICKENSHEETS D, 1997, THESIS STANFORD U, P96
[3] Microfabricated biaxial electrostatic torsional scanning mirror
Dickensheets, DL
Kino, GS
[J]. MICROMACHINING AND IMAGING, 1997, 3009 : 141 - 150
[4] FAN L, 1998, IEEE LEOS SUMM TOP M, P107
[5] Electrostatically driven micromirrors for a miniaturized confocal laser scanning microscope
Hofmann, U
Muehlmann, S
Witt, M
Dörschel, K
Schütz, R
Wagner, B
[J]. MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MEMS, 1999, 3878 : 29 - 38
[6] Micromirrors for direct writing systems and scanners
Lakner, H
Doleschal, W
Duerr, P
Gehner, A
Schenk, H
Wolter, A
Zimmer, G
[J]. MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MEMS, 1999, 3878 : 217 - 227
[7] OSHEA, 1985, ELEMENTS MODERN OPTI
[8] Schenk H., 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), P473, DOI 10.1109/MEMSYS.2000.838563
[9] Scanner design and resolution tradeoffs for miniature scanning displays
Urey, H
Wine, DW
Lewis, JR
[J]. FLAT PANEL DISPLAY TECHNOLOGY AND DISPLAY METROLOGY, 1999, 3636 : 60 - 68
[10] UREY H, 2000, C MOEMS MIN SYST SPI, V4178

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