Beam current density distribution of a vacuum arc ion source

被引:4
|
作者
Nikolaev, AG [1 ]
Oks, EM
Zhang, XJ
Cheng, C
机构
[1] Russian Acad Sci, Inst High Current Elect, Tomsk 634055, Russia
[2] State Univ Control Syst & Radioelect, Tomsk 634050, Russia
[3] Beijing Normal Univ, Inst Low Energy Nucl Phys, Beijing 100875, Peoples R China
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 1998年 / 69卷 / 02期
关键词
D O I
10.1063/1.1148573
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The distribution of the beam current density for metal ion vacuum are ion sources (MEVVA-type) lacks sufficient uniformity and its original form is similar to the Gaussian one. This is because of the plasma generation in a small space near the cathode spot. Further expansion of the plasma to the emission region does not improve this situation which poses a serious problem in creating a broad beam ion source. This article presents experimental results on the influence of various factors on the beam current density distribution. Experiments were carried out in Beijing with the MEVVA-IIA ion source. An additional magnetic field was applied to the are gap and a small metal grid covering the emission electrode was used. (C) 1998 American Institute of Physics.
引用
收藏
页码:807 / 809
页数:3
相关论文
共 50 条
  • [11] ON THE CURRENT INTENSITY LIMIT OF A VACUUM-ARC ION SOURCE.
    Brown, Ian G.
    IEEE Transactions on Plasma Science, 1987, PS-15 (04) : 346 - 350
  • [12] ON THE CURRENT INTENSITY LIMIT OF A VACUUM-ARC ION-SOURCE
    BROWN, IG
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 1987, 15 (04) : 346 - 350
  • [13] High-Charge-State Ion Beam Generation in a High-Current Pulsed Vacuum Arc Source
    Yushkov, Georgy Yu.
    Frolova, Valeria P.
    Nikolaev, Alexey G.
    Oks, Efim M.
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2019, 47 (08) : 3586 - 3589
  • [14] Effects of a dielectric material in an ion source on the ion beam current density and ion beam energy
    Fujiwara, Y.
    Sakakita, H.
    Nakamiya, A.
    Hirano, Y.
    Kiyama, S.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2016, 87 (02):
  • [15] Electron-beam enhancement of the metal vapor vacuum arc ion source
    Batalin, VA
    Bugaev, AS
    Gushenets, VI
    Hershcovitch, A
    Johnson, BM
    Kolomiets, AA
    Kuibeda, RP
    Kulevoy, TV
    Oks, EM
    Pershin, VI
    Petrenko, SV
    Seleznev, DN
    Yushkov, GY
    JOURNAL OF APPLIED PHYSICS, 2002, 92 (05) : 2884 - 2889
  • [16] Vacuum arc ion source with compound cathode and beam separation by bending magnet
    Savkin, K. P.
    Oks, E. M.
    Gushenets, V. I.
    Frolova, V. P.
    Nikolaev, A. G.
    Yushkov, G. Yu.
    2016 27TH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM (ISDEIV), VOL 2, 2016,
  • [17] MEASUREMENT OF ANGULAR-DISTRIBUTION OF ION CURRENT FROM A VACUUM ARC
    HEBERLEIN, JVR
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1978, 23 (02): : 137 - 137
  • [18] On the current density at the cathode of a vacuum arc
    Nemchinsky, Valerian
    EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2019, 84 (03):
  • [19] Vacuum arc ion source for heavy ion fusion
    Liu, F
    Qi, N
    Gensler, S
    Prasad, RR
    Krishnan, M
    Brown, IG
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (02): : 819 - 821
  • [20] High current vacuum-arc ion source for ion implantation and coating deposition technologies
    Ryabchikov, Alexander I.
    Ryabchikov, Igor A.
    Stepanov, Igor B.
    Dektyarev, Sergey V.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2006, 77 (03):