y Integration of Mid-Infrared Light Sources on Silicon-Based Waveguide Platforms in 3.5-4.7 m Wavelength Range

被引:14
|
作者
Malik, Aditya [1 ]
Spott, Alexander [1 ]
Stanton, Eric J. [1 ,2 ]
Peters, Jonathan D. [1 ]
Kirch, Jeremy Daniel [3 ]
Mawste, Luke J. [3 ]
Botez, Dan [3 ]
Meyer, Jerry R. [4 ]
Bowers, John E. [1 ]
机构
[1] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
[2] NIST, Div Appl Phys, Boulder, CO 80305 USA
[3] Univ Wisconsin, Dept Elect & Comp Engn, 1415 Johnson Dr, Madison, WI 53706 USA
[4] Naval Res Lab, Washington, DC 20375 USA
关键词
Quantum cascade lasers; Arrayed waveguide gratings; Silicon; Waveguide lasers; Propagation losses; Light sources; Semiconductor waveguides; silicon photonics; quantum cascade lasers; interband cascade lasers; QUANTUM CASCADE LASERS; ON-CHIP; PHOTONICS;
D O I
10.1109/JSTQE.2019.2949453
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Mid-infrared light sources are attracting attention for use in spectroscopic sensing, thermal imaging, and infrared countermeasures. Integration of these sources on Si-based waveguides allows for more functional and complex photonic circuits to be integrated on a single chip. This paper focuses on the key aspects of this integrated platform. The operation of silicon-on-insulator waveguides beyond 4.0m wavelength with increasing waveguide core thickness is discussed, and the effects of various cladding materials on waveguide propagation loss is demonstrated. Low loss waveguides and Mach-Zehnder interferometers in Ge-on-Si waveguide platform are discussed and beam combiners in the form of arrayed waveguide gratings are demonstrated in both the platforms. Interband cascade lasers are integrated on silicon-on-insulator waveguides with direct bonding to realize Fabry-Perot lasers. Power scaling of integrated lasers is validated by integrating quantum cascade lasers with silicon-on-insulator beam combiners. Results for the first integrated Fabry-Perot quantum cascade lasers on Ge-on-Si waveguides are discussed, together with the potential use of these waveguides to provide a better heat sink for integrated mid-infrared light sources.
引用
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页数:9
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