FABRICATION OF PIEZOCERAMIC MULTILAYER ACTUATORS WITH METAMATERIAL CONSTRUCTION

The face-shear (d(36)) mode is very useful in precision driving and damage detection. However, the piezoelectric coefficient d(36) is only found in some single crystals with special cutting direction or some specific point groups. In this work, the metamaterial construction is introduced to prepare piezoelectric ceramics with a quasi-shear mode (d(36)). A piezoelectric multilayer actuator (MLA) with a quasi-shear mode of d(36) is designed using finite element method. The MLA (length 12 mm, width 12 mm) consist of ceramic layer and inner electrode layer. A vertex angle of the MLAs could achieve a displacement of 3.2 mu m at 50V.