FABRICATION OF PIEZOCERAMIC MULTILAYER ACTUATORS WITH METAMATERIAL CONSTRUCTION

被引：0
|
作者：
Hu, Xiao-pin [1 ]
Yan, Kang [1 ]
Wu, Da-wei [1 ]
机构：
[1] Nanjing Univ Aeronaut & Astronaut, State Key Lab Mech & Control Mech Struct, Nanjing 210016, Peoples R China
来源：
PROCEEDINGS OF THE 2020 15TH SYMPOSIUM ON PIEZOELECTRCITY, ACOUSTIC WAVES AND DEVICE APPLICATIONS (SPAWDA) | 2021年
基金：
中国国家自然科学基金;
关键词：
Multilayer actuators (MLAs); Metamaterial; Inner electrode; Vibration mode;
D O I：
10.1109/SPAWDA51471.2021.9445476
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
The face-shear (d(36)) mode is very useful in precision driving and damage detection. However, the piezoelectric coefficient d(36) is only found in some single crystals with special cutting direction or some specific point groups. In this work, the metamaterial construction is introduced to prepare piezoelectric ceramics with a quasi-shear mode (d(36)). A piezoelectric multilayer actuator (MLA) with a quasi-shear mode of d(36) is designed using finite element method. The MLA (length 12 mm, width 12 mm) consist of ceramic layer and inner electrode layer. A vertex angle of the MLAs could achieve a displacement of 3.2 mu m at 50V.
引用
收藏
页码：386 / 389
页数：4
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