Metal-Insulator Transition (MIT) Actuators for Microswitching Applications

被引：0

作者：

Mahanta, Protap ^{[1
]}

Munna, Mohiuddin ^{[1
]}

Coutu, Ronald A., Jr. ^{[1
]}

机构：

[1] Marquette Univ, Dept Elect & Comp Engn, Milwaukee, WI 53223 USA

来源：

INTERNATIONAL WORKSHOP ON THIN FILMS FOR ELECTRONICS, ELECTRO-OPTICS, ENERGY, AND SENSORS 2019 | 2019年 / 11371卷

关键词：

Metal-Insulator Transition; Vanadium Dioxide (VO2); Micro-contact Switch; Contact Resistance;

D O I：

10.1117/12.2534711

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Transitional metal oxides have generated considerable interest in electronics and other engineering applications over the last few decades. These materials show several orders of magnitude metal-insulator transition (MIT) when triggered by an external stimuli. In this paper, an MIT (Vanadium Dioxide (VO2)) -based bimorph cantilever shows promising performance due to its large volumetric work density, ultrafast response, and reliability. This work, we propose and simulate a cantilever actuated via VO2 for a micro-contact switch. Our results show VO2 based actuators show promising performance in terms of deflection, resonance frequency, and lifetime.

引用

页数：5

共 15 条

[1] [Anonymous], 2008, SHIGLEYS MECH ENG DE
[2] A review of micro-contact physics, materials, and failure mechanisms in direct-contact RF MEMS switches
Basu, A.
Adams, G. G.
McGruer, N. E.
[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2016, 26 (10)
[3] Colossal thermal-mechanical actuation via phase transition in single-crystal VO2 microcantilevers
Cao, Jinbo
Fan, Wen
Zhou, Qin
Sheu, Erica
Liu, Aiwen
Barrett, C.
Wu, J.
[J]. JOURNAL OF APPLIED PHYSICS, 2010, 108 (08)
[4] Micro-switches with sputtered Au, AuPd, Au-on-AuPt, and AuPtCu alloy electric contacts
Coutu, RA
Kladitis, PE
Cortez, R
Strawser, RE
Crane, RL
[J]. ELECTRICAL CONTACTS-2004: PROCEEDINGS OF THE 50TH IEEE HOLM CONFERENCE ON ELECTRICAL CONTACTS/THE 22ND INTERNATIONAL CONFERENCE ON ELECTRICAL CONTACTS, 2004, : 214 - 221
[5] A 0.2 V Micro-Electromechanical Switch Enabled by a Phase Transition
Dong, Kaichen
Choe, Hwan Sung
Wang, Xi
Liu, Huili
Saha, Bivas
Ko, Changhyun
Deng, Yang
Tom, Kyle B.
Lou, Shuai
Wang, Letian
Grigoropoulos, Costas P.
You, Zheng
Yao, Jie
Wu, Junqiao
[J]. SMALL, 2018, 14 (14)
[6] Quick Switch
Ha, Sieu D.
Zhou, You
Duwel, Amy E.
White, Douglas W.
Ramanathan, Shriram
[J]. IEEE MICROWAVE MAGAZINE, 2014, 15 (06) : 32 - 44
[7] Giant-Amplitude, High-Work Density Microactuators with Phase Transition Activated Nanolayer Bimorphs
Liu, Kai
Cheng, Chun
Cheng, Zhenting
Wang, Kevin
Ramesh, Ramamoorthy
Wu, Junqiao
[J]. NANO LETTERS, 2012, 12 (12) : 6302 - 6308
[8] A Wireless Sensor Network Deployment for Rural and Forest Fire Detection and Verification
Lloret, Jaime
Garcia, Miguel
Bri, Diana
Sendra, Sandra
[J]. SENSORS, 2009, 9 (11) : 8722 - 8747
[9] Flexible, All-Inorganic Actuators Based on Vanadium Dioxide and Carbon Nanotube Bimorphs
Ma, He
Hou, Jiwei
Wang, Xuewen
Zhang, Jin
Yuan, Zhiquan
Xiao, Lin
Wei, Yang
Fan, Shoushan
Jiang, Kaili
Liu, Kai
[J]. NANO LETTERS, 2017, 17 (01) : 421 - 428
[10] Performance Comparison of Phase Change Materials and Metal-Insulator Transition Materials for Direct Current and Radio Frequency Switching Applications
Mahanta, Protap
Munna, Mohiuddin
Coutu, Ronald A., Jr.
[J]. TECHNOLOGIES, 2018, 6 (02)

← 1 2 →