Optical characterization of phase changing Ge2Sb2Te5 chalcogenide films

被引：8

作者：

Franta, Daniel ^{[1
]}

Hrdlicka, Martin ^{[2
]}

Necas, David ^{[1
]}

Frumar, Miloslav ^{[2
]}

Ohlidal, Ivan ^{[1
]}

Pavlista, Martin ^{[2
]}

机构：

[1] Masaryk Univ, Fac Sci, Dept Phys Elect, Kotlarska 2, CS-61137 Brno, Czech Republic

[2] Univ Pardub, Res Ctr & Dept Gen & Inorg Chem, CZ-53210 Pardubice, Czech Republic

来源：

PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 5, NO 5 | 2008年 / 5卷 / 05期

关键词：

D O I：

10.1002/pssc.200777768

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

The variable angle spectroscopic ellipsometry and spectroscopic reflectometry is used for the optical characterization of the as-deposited and annealed Ge2Sb2Te5 (GST) films. The dispersion model of the GST films is based on the parameterization of the density of electronic states. As a consequence of annealing, roughness of the upper boundaries of the GST films originates. This annealing also causes the evident redistribution of the density of electronic states from the higher energies to lower energies. The roughening and redistribution of the electrons are explained by means of the phase change of the GST films from amorphous to polycrystalline structure. This phase change is accompanied by changing the conductivity of the films that was proved by introducing the terms of the free carriers in the dispersion model of the CST films.

引用

页码：1324 / +

页数：2

共 18 条

[1]

Adachi S., 1999, OPTICAL PROPERTIES C

[2] Influence of lateral dimensions of the irregularities on the optical quantities of rough surfaces [J].

Franta, D. ;

Ohlidal, I. .

JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2006, 8 (09) :763-774

[3] Thermal stability of the optical properties of plasma deposited diamond-like carbon thin films [J].

Franta, D ;

Bursíková, V ;

Ohlídal, I ;

Zajícková, L ;

St'ahel, P .

[4] Comparison of effective medium approximation and Rayleigh-Rice theory concerning ellipsometric characterization of rough surfaces [J].

Franta, D ;

Ohlídal, I .

OPTICS COMMUNICATIONS, 2005, 248 (4-6) :459-467

[5] Optical properties of diamond-like carbon films containing SiOx studied by the combined method of spectroscopic ellipsometry and spectroscopic reflectometry [J].

Franta, D ;

Ohlídal, I ;

Bursíková, V ;

Zajicková, L .

THIN SOLID FILMS, 2004, 455 :393-398

[6]

Franta D, 2003, ACTA PHYS SLOVACA, V53, P373

[7] Optical properties of diamond-like carbon films containing SiOx [J].

Franta, D ;

Ohlídal, I ;

Bursíková, V ;

Zajíková, L .

[8] Ellipsometric parameters and reflectances of thin films with slightly rough boundaries [J].

Franta, D ;

Ohlidal, I .

JOURNAL OF MODERN OPTICS, 1998, 45 (05) :903-934

[9] Expression of the optical constants of chalcogenide thin films using the new parameterization dispersion model [J].

Franta, D ;

Ohlídal, I ;

Frumar, M ;

Jedelsky, J .

APPLIED SURFACE SCIENCE, 2003, 212 :116-121

[10]

FRANTA D, 2008, OPT EXPRESS UNPUB

← 1 2 →